Founded 2024 · Hangzhou HQ · Shanxi Factory
Silicon Materials & Parts
Specialist Manufacturer
Hangzhou Siltree Semiconductor delivers high-quality semiconductor silicon parts and silicon materials, including columnar polysilicon and monocrystalline silicon, serving the world's leading semiconductor equipment manufacturers.
Long-standing partner in silicon part design and production for etch equipment makers
50%
Market share
40%
Market share
5%
Market share
1%
Market share
Etch equipment market share (2023 data)
Products
Silicon Materials & Silicon Parts
A complete production chain, from polysilicon and monocrystalline materials to precision parts such as UGR rings and electrodes, delivered as a one-stop solution.
Monocrystalline Silicon
Diameter 330-400mm, length 1800-2300mm. Dislocation-free with low oxygen (3-5ppma below OEM); head oxygen content 12-14ppm.
- 7N purity
- Low O ≤20ppma
- Low C ≤1ppma
Cast Polysilicon
Process forming benchmarked against OEM material standards, offered at 6N purity to meet the strict requirements of etch equipment.
- 6N purity
- Low C ≤10ppma
- Low O ≤10ppma
Silicon Part Machining
Precision silicon parts including UGR rings, electrodes and confinement rings, covering the full flow from material to machining and cleaning.
- Precision machining
- High-purity cleaning
- Cleanroom packaging
Facilities
Complete Production & Inspection Capabilities
Fully equipped with wire saws, grinders, machining centers, LAP/Polish machines, CMM, 2D measuring systems, roughness testers, FT-IR, ICP-MS and more
Silicon Material Gallery
Core Strengths
Deep Roots in Semiconductor Equipment Parts
Our team has long worked in the semiconductor equipment parts industry, taking part in silicon part design and production for LAM Research, Tokyo Electron (TEL), AMEC and NAURA.
- Deep understanding of OEM specs and design principles
- Long-term commitment to lean manufacturing
- Strict quality control standards
- Vertical integration of material, machining and cleaning
Chance Li
Founder / CEO
Technology
Hot Zone Optimization Results
Industry-leading low oxygen and low carbon levels achieved through hot zone optimization
<20ppm
Low oxygen content
Head oxygen 12-14ppm vs OEM 15-18ppm
<0.5ppm
Low carbon content
Carbon not detected (ICP-MS)
7N
Monocrystal purity
All 20 key elements below detection limit
Large-Diameter Ingot Pulling
Capable of pulling a range of large monocrystals from φ380mm to φ560mm
Columnar Polysilicon Ingots
In-house hot zones and crucibles with advanced columnar polysilicon processes matched to silicon part production, delivering uniform grain size and high purity
Precise Resistivity Control
Well-established resistivity calculation and application methods for precise control of monocrystalline ingot resistivity
Silicon Material Machining
A team with years of silicon machining experience that quickly eliminates stress and brittle fracture during processing, with proven volume production capability
Showcase
Silicon Part Products
UGR Silicon Ring
High-precision silicon ring with precision groove design for LAM and other equipment
Confinement Silicon Ring
High-purity silicon ring component for plasma confinement
Silicon Electrode
High-purity silicon electrode meeting the precision requirements of semiconductor equipment
Let's Work Together
Whether you need monocrystalline or polycrystalline silicon materials or silicon part machining, Siltree delivers high-quality solutions.
Thank you for your time!