Products

Silicon Materials & Silicon Parts

Siltree delivers high-quality semiconductor silicon parts and silicon materials, including columnar polysilicon and monocrystalline silicon, serving the world's leading etch equipment manufacturers.

Monocrystalline Silicon

Our monocrystalline material, already supplied in volume, is dislocation-free (without slip) with low oxygen (3-5ppma below OEM material) and head oxygen content of 12-14ppm, well ahead of industry standards.

Specifications

Diameter: 330-400mm
Length: 1800-2300mm
Purity: 7N
Resistivity: 0.005-85 Ω·cm
Oxygen: ≤20ppma
Carbon: ≤1ppma
Dislocation: Free
Dopant: Boron

Key Advantages

Dislocation-free (without slip)
Low oxygen: head 12-14ppm vs OEM 15-18ppm
Carbon not detected (ICP-MS)
All 20 key elements below detection limit

Hoisting a monocrystalline ingot - production floor

Monocrystalline silicon surface texture close-up

Third-Party Test Reports (Eurofins EAG)

Material quality verified by an accredited third-party laboratory

Oxygen content

12 ppm wt

Carbon content

<5 ppm wt

Third-party test report - impurity element analysis

Impurity analysis

All 20 key elements <0.005

Polysilicon surface texture

Cast Polysilicon

Siltree's polycrystalline material is formed to OEM material standards, with overall appearance, sides, bottom and head all reaching industry-leading levels.

Specifications

Purity: 6N
Resistivity: ≤0.02 / 1-10 Ω·cm
Oxygen: ≤10ppma
Carbon: ≤10ppma
Density: 2.33 g/cm³
Bending strength: 140±20 MPa
Thermal conductivity: 150±15 W/(m·K)
Dopant: Per customer spec

Silicon Parts

With a wide range of high-precision machining equipment, we provide a full-process service from material and machining to cleaning and cleanroom packaging.

UGR Silicon Ring

Upper gas ring for etch equipment, precision-machined for uniform gas distribution.

Electrode

A critical component of plasma etch equipment requiring high purity and precise dimensions.

Confinement Silicon Ring

Confinement ring that controls plasma distribution and etch uniformity.

Square Silicon Parts

Precision-machined square silicon parts for specific equipment applications.

Silicon Rod

High-purity silicon rod with precision-machined tip.

Confinement Ring (Detail)

Detailed view of a confinement ring product.

Production capability infographic - large ingot pulling, columnar polysilicon ingots, precise resistivity control, silicon machining

Production Equipment

Advanced crystal pullers, casting furnaces and a range of precision machining equipment ensure stable, reliable product quality.

Core Equipment

Crystal puller
Polysilicon casting furnace
Wire saw
Coredrill
Grinder
Machining center
LAP/Polish machine
High-purity cleaning line

Factory Floor Layout

Inspection Equipment

Comprehensive inspection capabilities ensure every batch meets strict quality standards.

CMM
2D measuring system
Roughness tester
Resistivity tester
FT-IR Spectrometer
ICP-MS
Microscope
Box Furnace

Material Properties Comparison

Detailed physical properties of monocrystalline and polycrystalline silicon

Property	Single crystal	Polycrystal
Density	2.33 g/cm³	2.33 g/cm³
Bending Strength	140±20 MPa	140±20 MPa
Young's Modulus	155±20 GPa	160±10 GPa
Vickers Hardness	9.2±2 GPa	9.2±2 GPa
Coefficient of Thermal Expansion (CTE)	4.2±0.5 E-6/°C [1100°C]	4.2±0.5 E-6/°C [1100°C]
Thermal Conductivity	140±15 W/(m·K) [20°C]	150±15 W/(m·K) [20°C]
Thermal Diffusivity	60±40 mm²/s [50°C]	80±10 mm²/s [50°C]

Need a quote or technical advice?

Our technical team is ready to help. Contact us for detailed product specifications and pricing.